31 October 2012Manufacturing / Production Technology, Hardware & Services
The number of semiconductor devices with low ESD threshold levels is expected to increase with each new device generation, or technology node.
The TargetBlower Model 6202e ioniser from Simco specifically fits the protection requirements of devices that are sensitive to as low as ±5 V. It is designed for point-of-use applications requiring near critical environment static control.
The continuous ioniser cleaner feature means customers can position the TargetBlower in a desired location and the product will perform with very little required maintenance. Its collimated chassis helps ensure fast, reliable static discharge.
Standard features include a Facility Monitoring System (FMS) output for remote monitoring of alarms at the tool or system level; an alarm LED; high/off/low fan speed control; and a balance control adjustment trimpot.
The ioniser incorporates a thin-filament emitter wire mounted in a circular configuration that generates a flowing stream of ions towards the application area. Its microprocessor automatically operates upon power-on and every seven days when the ioniser is continuously turned on. The wire is cleaned with a swiping mechanism; ionisation is not stopped at this time.
After initial setup to meet the application environment specifications, no further adjustments to the TargetBlower are necessary. Its small size and unique form factor provide flexibility in choosing a mounting location that allows the best ESD protection.
The system has a separate orderable external power supply that converts 100-240 V a.c., 50/60 Hz to 24 V d.c. It can also be operated directly from 24 V d.c. power supplied by the process tool. It comes with a CE declaration of conformity for emissions and has been tested for safety by a recognised testing laboratory. It is also RoHS compliant.
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